Four point probe geometry modified correction factor for determining resistivity
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The International Society for Optical Engineering (SPIE)
2014
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my.unimap-347012017-11-29T08:26:33Z Four point probe geometry modified correction factor for determining resistivity Algahtani, Fahid Thulasiram, Karthikram B. Nashrul Fazli, Mohd Nasir, Dr. Holland, Anthony Stephen s3276519@student.rmit.edu.au nashrul@unimap.edu.my Resistivity Sheet resistance Test structure Link to publisher's homepage at http://spiedigitallibrary.org/ The four-point probe technique is well known for its use in determining sheet resistance and resistivity (or effective resistivity) of thin films. Using a standard four-point probe setup, relatively large area samples are required. The convention is that the distance from any probe in the probe arrangement should be at least ten times the probe spacing from the sample boundary in order to use the fixed correction factor. In this paper we show, using computer modelling, how accurate measurements can be made using appropriate correction factors for samples that are either small or of any thickness. For the significant extent of variations used, the correction factor does not vary significantly. 2014-05-24T17:48:46Z 2014-05-24T17:48:46Z 2013-12-09 Article Proceedings of SPIE -The International Society for Optical Engineering (SPIE), vol. 8923, 2013, pages 1-6 978-081949814-4 0277-786X http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1809880 http://dspace.unimap.edu.my:80/dspace/handle/123456789/34701 http://dx.doi.org/10.1117/12.2034057 en The International Society for Optical Engineering (SPIE) |
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Resistivity Sheet resistance Test structure |
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Resistivity Sheet resistance Test structure Algahtani, Fahid Thulasiram, Karthikram B. Nashrul Fazli, Mohd Nasir, Dr. Holland, Anthony Stephen Four point probe geometry modified correction factor for determining resistivity |
| description |
Link to publisher's homepage at http://spiedigitallibrary.org/ |
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s3276519@student.rmit.edu.au |
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s3276519@student.rmit.edu.au Algahtani, Fahid Thulasiram, Karthikram B. Nashrul Fazli, Mohd Nasir, Dr. Holland, Anthony Stephen |
| format |
Article |
| author |
Algahtani, Fahid Thulasiram, Karthikram B. Nashrul Fazli, Mohd Nasir, Dr. Holland, Anthony Stephen |
| author_sort |
Algahtani, Fahid |
| title |
Four point probe geometry modified correction factor for determining resistivity |
| title_short |
Four point probe geometry modified correction factor for determining resistivity |
| title_full |
Four point probe geometry modified correction factor for determining resistivity |
| title_fullStr |
Four point probe geometry modified correction factor for determining resistivity |
| title_full_unstemmed |
Four point probe geometry modified correction factor for determining resistivity |
| title_sort |
four point probe geometry modified correction factor for determining resistivity |
| publisher |
The International Society for Optical Engineering (SPIE) |
| publishDate |
2014 |
| url |
http://dspace.unimap.edu.my:80/dspace/handle/123456789/34701 |
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1643802755032154112 |