Wettability and surface roughness study on RIE treated aluminium deposited surface
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Trans Tech Publications
2015
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my.unimap-389912015-02-23T13:23:37Z Wettability and surface roughness study on RIE treated aluminium deposited surface Retnasamy, Vithyacharan Zaliman, Sauli, Dr. Uda, Hashim, Prof. Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow Ramzan, Mat Ayub vc.sundres@gmail.com Design of Experiment (DoE) RIE Wettability Link to publisher's homepage at http://www.ttp.net/ Design of Experiment (DOE) is a technique for optimizing process which has controllable inputs and measurable outputs. As a method of DOE, 24 Full Factorial design is used to study the effect of Reactive Ion Etch towards the surface roughness of aluminum pad and effect of the roughness produced towards the contact angle. Surface roughness analysis is done using Atomic Force Microscop (AFM). Contact angle is measured using AutoCad software from the images captured from droplet test. This contact angles must be more than 90° for non-wetting profile or less than 90° for wetting profile. This work is also done to understand the interaction between the process parameters and how each parameters will affect the etch rate. The results are analyzed which shows that the increase in surface roughness produces an increase on the contact angle and vice versa. 2015-02-23T13:23:37Z 2015-02-23T13:23:37Z 2014-04 Article Advanced Materials Research, vol.925, 2014, pages 101-104 1662-8985 http://dspace.unimap.edu.my:80/xmlui/handle/123456789/38991 http://www.scientific.net/AMR.925.101 10.4028/www.scientific.net/AMR.925.101 en Trans Tech Publications |
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English |
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Design of Experiment (DoE) RIE Wettability |
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Design of Experiment (DoE) RIE Wettability Retnasamy, Vithyacharan Zaliman, Sauli, Dr. Uda, Hashim, Prof. Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow Ramzan, Mat Ayub Wettability and surface roughness study on RIE treated aluminium deposited surface |
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Link to publisher's homepage at http://www.ttp.net/ |
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vc.sundres@gmail.com |
| author_facet |
vc.sundres@gmail.com Retnasamy, Vithyacharan Zaliman, Sauli, Dr. Uda, Hashim, Prof. Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow Ramzan, Mat Ayub |
| format |
Article |
| author |
Retnasamy, Vithyacharan Zaliman, Sauli, Dr. Uda, Hashim, Prof. Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow Ramzan, Mat Ayub |
| author_sort |
Retnasamy, Vithyacharan |
| title |
Wettability and surface roughness study on RIE treated aluminium deposited surface |
| title_short |
Wettability and surface roughness study on RIE treated aluminium deposited surface |
| title_full |
Wettability and surface roughness study on RIE treated aluminium deposited surface |
| title_fullStr |
Wettability and surface roughness study on RIE treated aluminium deposited surface |
| title_full_unstemmed |
Wettability and surface roughness study on RIE treated aluminium deposited surface |
| title_sort |
wettability and surface roughness study on rie treated aluminium deposited surface |
| publisher |
Trans Tech Publications |
| publishDate |
2015 |
| url |
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/38991 |
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1643798942920474624 |