Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase st...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf http://eprints.usm.my/49005/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |
| Summary: | This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet
(UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination. |
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