Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD

This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase st...

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Bibliographic Details
Main Authors: Siowwoon, Ng, Sau, Siong Tneh, Fong, Kwong Yam, Hassan, Zainuriah
Format: Conference or Workshop Item
Language:English
Published: 2017
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Online Access:http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf
http://eprints.usm.my/49005/
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Institution: Universiti Sains Malaysia
Language: English

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