Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase st...
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2017
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my.usm.eprints.49005 http://eprints.usm.my/49005/ Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah QC1-999 Physics This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination. 2017 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf Siowwoon, Ng and Sau, Siong Tneh and Fong, Kwong Yam and Hassan, Zainuriah (2017) Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD. In: The International Conference of Solid State Science and Technology (ICSSST 2017). |
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QC1-999 Physics |
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QC1-999 Physics Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD |
| description |
This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet
(UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination. |
| format |
Conference or Workshop Item |
| author |
Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah |
| author_facet |
Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah |
| author_sort |
Siowwoon, Ng |
| title |
Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_short |
Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_full |
Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_fullStr |
Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_full_unstemmed |
Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_sort |
optical properties and uv sensing response of nitrogendoped
tio2 thin film by cvd |
| publishDate |
2017 |
| url |
http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf http://eprints.usm.my/49005/ |
| _version_ |
1698697781944778752 |