Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures
Infrared spectroscopy (IR spectroscopy or vibrational spectroscopy) involves the interaction of infrared radiation with matter. It covers a range of techniques, mostly based on absorption spectroscopy. As with all spectroscopic techniques, it can be used to identify and study chemicals.
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2003
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/22538/ |
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| Institution: | Universiti Teknologi Malaysia |