Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures
Infrared spectroscopy (IR spectroscopy or vibrational spectroscopy) involves the interaction of infrared radiation with matter. It covers a range of techniques, mostly based on absorption spectroscopy. As with all spectroscopic techniques, it can be used to identify and study chemicals.
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2003
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my.utm.225382017-09-25T07:27:36Z http://eprints.utm.my/id/eprint/22538/ Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures Sakrani, Samsudi Abu Bakar, Suriani Ismail, Bakar Marwoto, Putut Q Science Infrared spectroscopy (IR spectroscopy or vibrational spectroscopy) involves the interaction of infrared radiation with matter. It covers a range of techniques, mostly based on absorption spectroscopy. As with all spectroscopic techniques, it can be used to identify and study chemicals. 2003 Conference or Workshop Item PeerReviewed Sakrani, Samsudi and Abu Bakar, Suriani and Ismail, Bakar and Marwoto, Putut (2003) Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures. In: The XX Regional Conf. On Solid State Science and Technology, 2003, Swiss-Garden Resort, Damai Laut, Lumut, Perak. |
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Q Science Sakrani, Samsudi Abu Bakar, Suriani Ismail, Bakar Marwoto, Putut Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures |
| description |
Infrared spectroscopy (IR spectroscopy or vibrational spectroscopy) involves the interaction of infrared radiation with matter. It covers a range of techniques, mostly based on absorption spectroscopy. As with all spectroscopic techniques, it can be used to identify and study chemicals. |
| format |
Conference or Workshop Item |
| author |
Sakrani, Samsudi Abu Bakar, Suriani Ismail, Bakar Marwoto, Putut |
| author_facet |
Sakrani, Samsudi Abu Bakar, Suriani Ismail, Bakar Marwoto, Putut |
| author_sort |
Sakrani, Samsudi |
| title |
Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures |
| title_short |
Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures |
| title_full |
Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures |
| title_fullStr |
Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures |
| title_full_unstemmed |
Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures |
| title_sort |
infrared analysis of a-c:h thin films grown by dc-pecvd at various chamber pressures |
| publishDate |
2003 |
| url |
http://eprints.utm.my/id/eprint/22538/ |
| _version_ |
1643647382108241920 |