Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures

• Main Authors: Sakrani, Samsudi, Abu Bakar, Suriani, Ismail, Bakar, Marwoto, Putut
• Format: Conference or Workshop Item
• Published: 2003
• Subjects: Q Science
• Online Access: http://eprints.utm.my/id/eprint/22538/
• Institution: Universiti Teknologi Malaysia

Infrared spectroscopy (IR spectroscopy or vibrational spectroscopy) involves the interaction of infrared radiation with matter. It covers a range of techniques, mostly based on absorption spectroscopy. As with all spectroscopic techniques, it can be used to identify and study chemicals.