Simulation and fabrication of extended gate ion sensitive field effect transistor for biosensor application
In this paper, we present the Extended Gate Ion Sensitive Field Effect Transistor (EGFET) which has a same function as the Ion Sensitive Field Effect Transistor (ISFET). In contrast to the traditional ISFET, the EGFET retains the original metal/polysilicon portion of the gate electrode and the sensi...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
2012
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/47503/ http://dx.doi.org/10.1007/978-3-642-35264-5_53 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Universiti Teknologi Malaysia |
Be the first to leave a comment!