An aluminium nitride based multilayer structure for Love mode surface acoustic wave devices
Love mode surface acoustic wave (SAW) devices are very useful for sensing in liquid environments. Earlier work on such devices mainly made use of zinc oxide (ZnO) thin films on silicon (Si) or silicon dioxide (SiO2). However, using them for sensing still required protection from contamination from z...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
IOP Publishing Ltd
2020
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85092435701&doi=10.1088%2f1361-6641%2fabadbb&partnerID=40&md5=6f90b49b519fed4098a1543858cf8079 http://eprints.utp.edu.my/29778/ |
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| Institution: | Universiti Teknologi Petronas |