An aluminium nitride based multilayer structure for Love mode surface acoustic wave devices

• Main Authors: Aslam, M.Z., Jeoti, V., Manzoor, S., Hanif, M., Junaid, M.
• Format: Article
• Published: IOP Publishing Ltd 2020
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85092435701&doi=10.1088%2f1361-6641%2fabadbb&partnerID=40&md5=6f90b49b519fed4098a1543858cf8079; http://eprints.utp.edu.my/29778/
• Institution: Universiti Teknologi Petronas

Love mode surface acoustic wave (SAW) devices are very useful for sensing in liquid environments. Earlier work on such devices mainly made use of zinc oxide (ZnO) thin films on silicon (Si) or silicon dioxide (SiO2). However, using them for sensing still required protection from contamination from z...