A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...
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Main Authors: | , , , , , , |
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Format: | Article |
Published: |
Springer
2021
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Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925 http://eprints.utp.edu.my/30423/ |
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Institution: | Universiti Teknologi Petronas |
Summary: | Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design. © 2021, The Author(s). |
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