A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...

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Bibliographic Details
Main Authors: Algamili, A.S., Khir, M.H.M., Dennis, J.O., Ahmed, A.Y., Alabsi, S.S., Ba Hashwan, S.S., Junaid, M.M.
Format: Article
Published: Springer 2021
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925
http://eprints.utp.edu.my/30423/
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Institution: Universiti Teknologi Petronas

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925
http://eprints.utp.edu.my/30423/

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