A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

• Main Authors: Algamili, A.S., Khir, M.H.M., Dennis, J.O., Ahmed, A.Y., Alabsi, S.S., Ba Hashwan, S.S., Junaid, M.M.
• Format: Article
• Published: Springer 2021
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925; http://eprints.utp.edu.my/30423/
• Institution: Universiti Teknologi Petronas

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design. © 2021, The Author(s).