Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies

Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies

Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Ra...

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Bibliographic Details
Main Authors: Le, Van Ngoc, Tran, Cao Vinh, Le, Quang Toai, Nguyen, Duc Thinh, Huynh, Thanh Dat
Format: Article
Language:English
Published: H. : ĐHQGHN 2017
Subjects:
WO3 structure
WO3 /ITO/glass
Raman spectroscopy
Online Access:http://repository.vnu.edu.vn/handle/VNU_123/56812
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Institution: Vietnam National University, Hanoi
Language: English

Internet

http://repository.vnu.edu.vn/handle/VNU_123/56812

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