Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies

Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies

Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Ra...

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Main Authors: Le, Van Ngoc, Tran, Cao Vinh, Le, Quang Toai, Nguyen, Duc Thinh, Huynh, Thanh Dat
Format: Article
Language:English
Published: H. : ĐHQGHN 2017
Subjects:
WO3 structure
WO3 /ITO/glass
Raman spectroscopy
Online Access:http://repository.vnu.edu.vn/handle/VNU_123/56812
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Institution: Vietnam National University, Hanoi
Language: English
id oai:112.137.131.14:VNU_123-56812
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spelling oai:112.137.131.14:VNU_123-568122018-07-13T09:17:58Z Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies Le, Van Ngoc Tran, Cao Vinh Le, Quang Toai Nguyen, Duc Thinh Huynh, Thanh Dat WO3 structure WO3 /ITO/glass Raman spectroscopy Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Raman spectroscopy. In this paper, we considered that the thickness of ITO layers about 150nm to 350nm clearly effects on the Raman and XRD spectrograms of WO3 films. 2017-08-14T08:38:08Z 2017-08-14T08:38:08Z 2009 Article Le, V. N, et al. (2009). Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies. VNU Jounial of Science , Mathematics- Physics, 25, 47-55. 2588-1124 http://repository.vnu.edu.vn/handle/VNU_123/56812 en application/pdf H. : ĐHQGHN
institution Vietnam National University, Hanoi
building VNU Library & Information Center
country Vietnam
collection VNU Digital Repository
language English
topic WO3 structure
WO3 /ITO/glass
Raman spectroscopy
spellingShingle WO3 structure
WO3 /ITO/glass
Raman spectroscopy
Le, Van Ngoc
Tran, Cao Vinh
Le, Quang Toai
Nguyen, Duc Thinh
Huynh, Thanh Dat
Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies
description Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Raman spectroscopy. In this paper, we considered that the thickness of ITO layers about 150nm to 350nm clearly effects on the Raman and XRD spectrograms of WO3 films.
format Article
author Le, Van Ngoc
Tran, Cao Vinh
Le, Quang Toai
Nguyen, Duc Thinh
Huynh, Thanh Dat
author_facet Le, Van Ngoc
Tran, Cao Vinh
Le, Quang Toai
Nguyen, Duc Thinh
Huynh, Thanh Dat
author_sort Le, Van Ngoc
title Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies
title_short Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies
title_full Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies
title_fullStr Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies
title_full_unstemmed Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies
title_sort survey of wo3 thin film structure built on ito/glass substrates by the raman and xrd spectroscopies
publisher H. : ĐHQGHN
publishDate 2017
url http://repository.vnu.edu.vn/handle/VNU_123/56812
_version_ 1680964096842792960

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