Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies
Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Ra...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
H. : ĐHQGHN
2017
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| Subjects: | |
| Online Access: | http://repository.vnu.edu.vn/handle/VNU_123/56812 |
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| Institution: | Vietnam National University, Hanoi |
| Language: | English |