Oxide charge evolution under crystallization of amorphous LieNbeO films
LieNbeO amorphous films were deposited onto Si substrates by the radio-frequency magnetron sputtering method in an Ar environment and an Ar(60%)þO2(40%) gas mixture. A positive effective fixed oxide charge Qeff having negative, -Qeff, and positive, þQeff, components, exists in the as-grown heteros...
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Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
H. : ĐHQGHN
2020
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Subjects: | |
Online Access: | http://repository.vnu.edu.vn/handle/VNU_123/89313 https://doi.org/10.1016/j.jsamd.2020.02.006 |
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Institution: | Vietnam National University, Hanoi |
Language: | English |
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