Transparent ZnO thin film deposition by a compact planar magnetron device

• Main Authors: Villamayor, Michelle Marie S., Hiramatsu, Yoshihito, Wada, Motoi, Ramos, Henry J.
• 格式: text
• 出版: Animo Repository 2014
• 主題: Thin films; Plasma devices; Physics
• 在線閱讀: https://animorepository.dlsu.edu.ph/faculty_research/11592
• 機構: De La Salle University

A 120 mm diameter by 80 mm compact planar DC magnetron device capable of maintaining a pure H2O discharge was used to deposit conducting transparent ZnO thin film on glass substrates via plasma enhanced chemical vapor deposition (PECVD). A square Zn target with an area of 55 ' 55 mm2 placed at...