Transparent ZnO thin film deposition by a compact planar magnetron device
A 120 mm diameter by 80 mm compact planar DC magnetron device capable of maintaining a pure H2O discharge was used to deposit conducting transparent ZnO thin film on glass substrates via plasma enhanced chemical vapor deposition (PECVD). A square Zn target with an area of 55 ' 55 mm2 placed at...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | text |
| Published: |
Animo Repository
2014
|
| Subjects: | |
| Online Access: | https://animorepository.dlsu.edu.ph/faculty_research/11592 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | De La Salle University |