Reactive ion etching of transition-metal alloys

• المؤلفون الرئيسيون: Akinaga, Hiro, Takano, Fumiyoshi, Matsumoto, Shigeno, Diño, Wilson A.
• التنسيق: text
• منشور في: Animo Repository 2006
• الموضوعات: Plasma etching; Transition metal alloys; Physics
• الوصول للمادة أونلاين: https://animorepository.dlsu.edu.ph/faculty_research/4563

For production of advanced spin-electronic devices, such as a magnetic random access memory with the higher-density memory cell, a reactive ion etching (RIE) process of transition metal alloys is the indispensable component of development, while no transition-metal compounds with the relatively high...