Influence of substrate heating on hole geometry and spatter area in femtosecond laser drilling of silicon

• Main Authors: Jiao, Lishi, Moon, Seung Ki, Ng, E. Y. K., Zheng, H. Y., Son, H. S.
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2014
• 主題: DRNTU::Engineering::Mechanical engineering::Kinematics and dynamics of machinery
• 在線閱讀: https://hdl.handle.net/10356/100052; http://hdl.handle.net/10220/19579
• 機構: Nanyang Technological University

The objective of this research is to evaluate the effects of the hole geometry and the spatter area around the drilled hole by femtosecond laser deep drilling on silicon with various temperatures. Deep through holes were produced on single crystal silicon wafer femtosecond laser at elevated temperat...