Study of femtosecond laser pulse drilling of silicon

• المؤلف الرئيسي: Jiao, Lishi
• مؤلفون آخرون: Zheng Hongyu
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2015
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/62050

Femtosecond (fs) laser drilling has been proved to be an efficient tool to drill various materials. In the drilling process, however, there are constant needs to eliminate spatter, control the taper, increase the aspect ratio and material removal rate. In addition, it is necessary to further underst...