A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator
In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation...
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Main Authors: | , , , , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/101292 http://hdl.handle.net/10220/18378 |
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Institution: | Nanyang Technological University |
Language: | English |
Summary: | In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors. |
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