A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation...

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Bibliographic Details
Main Authors: Dong, Bin, Ng, Geok Ing, Liu, Ai Qun, Cai, H., Kropelnicki, P., Tsai, J. M., Randles, A. B., Tang, M., Gu, Y. D., Suo, Z. G.
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2014
Subjects:
Online Access:https://hdl.handle.net/10356/101292
http://hdl.handle.net/10220/18378
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Institution: Nanyang Technological University
Language: English
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