A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

• Main Authors: Dong, Bin, Ng, Geok Ing, Liu, Ai Qun, Cai, H., Kropelnicki, P., Tsai, J. M., Randles, A. B., Tang, M., Gu, Y. D., Suo, Z. G.
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2014
• 主題: DRNTU::Science::Physics
• 在線閱讀: https://hdl.handle.net/10356/101292; http://hdl.handle.net/10220/18378
• 機構: Nanyang Technological University

In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation...