Mechanisms of difficulty to correlate the leakage current of high-k capacitor structures with defect states detected spectroscopically by the thermally stimulated current technique

• Main Author: Lau, W. S.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: Electrical and Electronic Engineering
• Online Access: https://hdl.handle.net/10356/101587; http://hdl.handle.net/10220/18695
• Institution: Nanyang Technological University

Historically, it has been difficult to correlate the leakage current of capacitor structures involving high-k dielectric materials and defect states detected spectroscopically by the thermally stimulated current (TSC) technique. Four mechanisms are proposed and solutions are explained with tantalum...