Error compensation of grating interferometer due to angular error of linear stage
Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holograph...
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Main Authors: | , , , |
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Other Authors: | |
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/102391 http://hdl.handle.net/10220/16510 |
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Institution: | Nanyang Technological University |
Language: | English |