Error compensation of grating interferometer due to angular error of linear stage

Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holograph...

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Bibliographic Details
Main Authors: Zhang, Y. L., Miao, J. W., Fan, Kuang-Chao, Cheng, Fang
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/102391
http://hdl.handle.net/10220/16510
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Institution: Nanyang Technological University
Language: English