Error compensation of grating interferometer due to angular error of linear stage

• Main Authors: Zhang, Y. L., Miao, J. W., Fan, Kuang-Chao, Cheng, Fang
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechatronics
• Online Access: https://hdl.handle.net/10356/102391; http://hdl.handle.net/10220/16510
• Institution: Nanyang Technological University

Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holograph...