Error compensation of grating interferometer due to angular error of linear stage

Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holograph...

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Main Authors: Zhang, Y. L., Miao, J. W., Fan, Kuang-Chao, Cheng, Fang
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/102391
http://hdl.handle.net/10220/16510
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1023912020-03-07T13:54:03Z Error compensation of grating interferometer due to angular error of linear stage Zhang, Y. L. Miao, J. W. Fan, Kuang-Chao Cheng, Fang School of Mechanical and Aerospace Engineering International Conference on Advanced Intelligent Mechatronics (2012 : Kaohsiung, Taiwan) DRNTU::Engineering::Mechanical engineering::Mechatronics Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holographic grating. Because the emitted beams are separated on the grating plane, the yaw error of the stage during motion will cause the optical path difference of the two beams resulting in phase shift. This study investigates the influence of the yaw error. Experiments show that after yaw error compensation, the LDGI readings can be significantly improved. 2013-10-16T04:00:06Z 2019-12-06T20:54:14Z 2013-10-16T04:00:06Z 2019-12-06T20:54:14Z 2012 2012 Conference Paper Fan, K.-C., Zhang, Y. L., Miao, J. W., & Cheng, F. (2012). Error compensation of grating interferometer due to angular error of linear stage. 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp.428-431. https://hdl.handle.net/10356/102391 http://hdl.handle.net/10220/16510 10.1109/AIM.2012.6265886 en © 2012 IEEE
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering::Mechatronics
spellingShingle DRNTU::Engineering::Mechanical engineering::Mechatronics
Zhang, Y. L.
Miao, J. W.
Fan, Kuang-Chao
Cheng, Fang
Error compensation of grating interferometer due to angular error of linear stage
description Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holographic grating. Because the emitted beams are separated on the grating plane, the yaw error of the stage during motion will cause the optical path difference of the two beams resulting in phase shift. This study investigates the influence of the yaw error. Experiments show that after yaw error compensation, the LDGI readings can be significantly improved.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Zhang, Y. L.
Miao, J. W.
Fan, Kuang-Chao
Cheng, Fang
format Conference or Workshop Item
author Zhang, Y. L.
Miao, J. W.
Fan, Kuang-Chao
Cheng, Fang
author_sort Zhang, Y. L.
title Error compensation of grating interferometer due to angular error of linear stage
title_short Error compensation of grating interferometer due to angular error of linear stage
title_full Error compensation of grating interferometer due to angular error of linear stage
title_fullStr Error compensation of grating interferometer due to angular error of linear stage
title_full_unstemmed Error compensation of grating interferometer due to angular error of linear stage
title_sort error compensation of grating interferometer due to angular error of linear stage
publishDate 2013
url https://hdl.handle.net/10356/102391
http://hdl.handle.net/10220/16510
_version_ 1681040847519350784