A review of interferometric techniques with possible improvement in pattern resolution using near-field patterning

In this paper, we will be initially doing review on the advancement of interference lithography (IL) which is a wellestablished technique for its facile, efficient, and economical approach to achieve large-scale patterning in a wide variety of substrates at sub-wavelength resolution. Following this,...

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Bibliographic Details
Main Authors: Pae, J. Y., Murukeshan, Vadakke Matham
Other Authors: Asundi, Anand K.
Format: Conference or Workshop Item
Language:English
Published: 2018
Subjects:
Online Access:https://hdl.handle.net/10356/102552
http://hdl.handle.net/10220/47259
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Institution: Nanyang Technological University
Language: English
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