Development of smart semiconductor manufacturing : operations research and data science perspectives

With advances in information and telecommunication technologies and data-enabled decision making, smart manufacturing can be an essential component of sustainable development. In the era of the smart world, semiconductor industry is one of the few global industries that are in a growth mode to smart...

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Main Authors: Khakifirooz, Marzieh, Fathi, Mahdi, Wu, Kan
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2019
Subjects:
Online Access:https://hdl.handle.net/10356/103303
http://hdl.handle.net/10220/49962
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1033032023-03-04T17:20:07Z Development of smart semiconductor manufacturing : operations research and data science perspectives Khakifirooz, Marzieh Fathi, Mahdi Wu, Kan School of Mechanical and Aerospace Engineering Cloud Computing Engineering::Mechanical engineering Cyber-physical Space With advances in information and telecommunication technologies and data-enabled decision making, smart manufacturing can be an essential component of sustainable development. In the era of the smart world, semiconductor industry is one of the few global industries that are in a growth mode to smartness, due to worldwide demand. The important opportunities that can boost the cost reduction of productivity and improve quality in wafer fabrication are based on the simulations of actual environment in Cyber-Physical Space and integrate them with decentralized decision-making systems. However, this integration faced the industry with novel unique challenges. The stream of the data from sensors, robots, and Cyber-Physical Space can aid to make the manufacturing smart. Therefore, it would be an increased need for modeling, optimization, and simulation for the value delivery from manufacturing data. This paper aims to review the success story of smart manufacturing in semiconductor industry with the focus on data-enabled decision making and optimization applications based on operations research and data science perspective. In addition, we will discuss future research directions and new challenges for this industry. Published version 2019-09-19T03:00:13Z 2019-12-06T21:09:31Z 2019-09-19T03:00:13Z 2019-12-06T21:09:31Z 2019 Journal Article Khakifirooz, M., Fathi, M., & Wu, K. (2019). Development of smart semiconductor manufacturing : operations research and data science perspectives. IEEE Access, 7, 108419-108430. doi:10.1109/ACCESS.2019.2933167 https://hdl.handle.net/10356/103303 http://hdl.handle.net/10220/49962 10.1109/ACCESS.2019.2933167 en IEEE Access © 2019 IEEE. This journal is 100% open access, which means that all content is freely available without charge to users or their institutions. All articles accepted after 12 June 2019 are published under a CC BY 4.0 license*, and the author retains copyright. Users are allowed to read, download, copy, distribute, print, search, or link to the full texts of the articles, or use them for any other lawful purpose, as long as proper attribution is given. 12 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Cloud Computing
Engineering::Mechanical engineering
Cyber-physical Space
spellingShingle Cloud Computing
Engineering::Mechanical engineering
Cyber-physical Space
Khakifirooz, Marzieh
Fathi, Mahdi
Wu, Kan
Development of smart semiconductor manufacturing : operations research and data science perspectives
description With advances in information and telecommunication technologies and data-enabled decision making, smart manufacturing can be an essential component of sustainable development. In the era of the smart world, semiconductor industry is one of the few global industries that are in a growth mode to smartness, due to worldwide demand. The important opportunities that can boost the cost reduction of productivity and improve quality in wafer fabrication are based on the simulations of actual environment in Cyber-Physical Space and integrate them with decentralized decision-making systems. However, this integration faced the industry with novel unique challenges. The stream of the data from sensors, robots, and Cyber-Physical Space can aid to make the manufacturing smart. Therefore, it would be an increased need for modeling, optimization, and simulation for the value delivery from manufacturing data. This paper aims to review the success story of smart manufacturing in semiconductor industry with the focus on data-enabled decision making and optimization applications based on operations research and data science perspective. In addition, we will discuss future research directions and new challenges for this industry.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Khakifirooz, Marzieh
Fathi, Mahdi
Wu, Kan
format Article
author Khakifirooz, Marzieh
Fathi, Mahdi
Wu, Kan
author_sort Khakifirooz, Marzieh
title Development of smart semiconductor manufacturing : operations research and data science perspectives
title_short Development of smart semiconductor manufacturing : operations research and data science perspectives
title_full Development of smart semiconductor manufacturing : operations research and data science perspectives
title_fullStr Development of smart semiconductor manufacturing : operations research and data science perspectives
title_full_unstemmed Development of smart semiconductor manufacturing : operations research and data science perspectives
title_sort development of smart semiconductor manufacturing : operations research and data science perspectives
publishDate 2019
url https://hdl.handle.net/10356/103303
http://hdl.handle.net/10220/49962
_version_ 1759858118243647488