Development of smart semiconductor manufacturing : operations research and data science perspectives

• Main Authors: Khakifirooz, Marzieh, Fathi, Mahdi, Wu, Kan
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2019
• Subjects: Cloud Computing; Engineering::Mechanical engineering; Cyber-physical Space
• Online Access: https://hdl.handle.net/10356/103303; http://hdl.handle.net/10220/49962
• Institution: Nanyang Technological University

With advances in information and telecommunication technologies and data-enabled decision making, smart manufacturing can be an essential component of sustainable development. In the era of the smart world, semiconductor industry is one of the few global industries that are in a growth mode to smart...