Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach

Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their b...

Full description

Saved in:
Bibliographic Details
Main Authors: Liu, Haotian, Zhang, Li, Li, Holden King Ho, Tan, Ooi Kiang
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2019
Subjects:
Gas Sensor
Metal Oxide (MOX) Sensor
DRNTU::Engineering::Electrical and electronic engineering
Online Access:https://hdl.handle.net/10356/103552
http://hdl.handle.net/10220/47336
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English

Internet

https://hdl.handle.net/10356/103552
http://hdl.handle.net/10220/47336

Similar Items