Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach

• Main Authors: Liu, Haotian, Zhang, Li, Li, Holden King Ho, Tan, Ooi Kiang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2019
• Subjects: Gas Sensor; Metal Oxide (MOX) Sensor; DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/103552; http://hdl.handle.net/10220/47336
• Institution: Nanyang Technological University

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their b...