Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their b...
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sg-ntu-dr.10356-1035522020-09-26T22:18:42Z Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach Liu, Haotian Zhang, Li Li, Holden King Ho Tan, Ooi Kiang School of Electrical and Electronic Engineering School of Mechanical and Aerospace Engineering Temasek Laboratories Gas Sensor Metal Oxide (MOX) Sensor DRNTU::Engineering::Electrical and electronic engineering The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility. Published version 2019-01-03T05:01:37Z 2019-12-06T21:15:11Z 2019-01-03T05:01:37Z 2019-12-06T21:15:11Z 2018 Journal Article Liu, H., Zhang, L., Li, H. K. H., & Tan, O. K. (2018). Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach. Micromachines, 9(11), 557-. doi:10.3390/mi9110557 https://hdl.handle.net/10356/103552 http://hdl.handle.net/10220/47336 10.3390/mi9110557 en Micromachines © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). 24 p. application/pdf |
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Gas Sensor Metal Oxide (MOX) Sensor DRNTU::Engineering::Electrical and electronic engineering Liu, Haotian Zhang, Li Li, Holden King Ho Tan, Ooi Kiang Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach |
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The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility. |
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School of Electrical and Electronic Engineering |
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School of Electrical and Electronic Engineering Liu, Haotian Zhang, Li Li, Holden King Ho Tan, Ooi Kiang |
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Article |
author |
Liu, Haotian Zhang, Li Li, Holden King Ho Tan, Ooi Kiang |
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Liu, Haotian |
title |
Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach |
title_short |
Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach |
title_full |
Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach |
title_fullStr |
Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach |
title_full_unstemmed |
Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach |
title_sort |
microhotplates for metal oxide semiconductor gas sensor applications—towards the cmos-mems monolithic approach |
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2019 |
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https://hdl.handle.net/10356/103552 http://hdl.handle.net/10220/47336 |
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