The system and the mechatronics of a pagoda type micro-CMM
This paper presents design considerations of a precision micro-CMM system and its mechatronic modules. The basic design concept is to meet the requirements of high stiffness, force balance, thermal balance, Abbe principle, metrology frame and vibration-free. Based on these criteria, a novel bridge...
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/103826 http://hdl.handle.net/10220/16965 |
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| Institution: | Nanyang Technological University |
| Language: | English |