Multiple wavelength fringe analysis for surface profile measurements

• Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit
• Other Authors: School of Chemical and Biomedical Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2019
• Subjects: Fringe Analysis; Engineering::Chemical engineering; Step-height
• Online Access: https://hdl.handle.net/10356/104900; http://hdl.handle.net/10220/49156
• Institution: Nanyang Technological University

Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been succes...