Multiple wavelength fringe analysis for surface profile measurements
Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been succes...
Saved in:
| Main Authors: | , |
|---|---|
| 其他作者: | |
| 格式: | Conference or Workshop Item |
| 語言: | English |
| 出版: |
2019
|
| 主題: | |
| 在線閱讀: | https://hdl.handle.net/10356/104900 http://hdl.handle.net/10220/49156 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Nanyang Technological University |
| 語言: | English |