Property study of aluminium oxide thin films by thermal annealing

Property study of aluminium oxide thin films by thermal annealing

Aluminium oxide thin films had been prepared by off-plane filtered cathodic vacuum arc (FCVA) under the oxygen partial pressure of 5 × 10-4 Torr at room temperature. Annealing effects on the properties of the films between 200 °C and 900 °C were investigated. Experiments results showed that the surf...

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Bibliographic Details
Main Authors: Zhao, Zhiwei, Tay, Beng Kang
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Electrical and electronic engineering
Online Access:https://hdl.handle.net/10356/105232
http://hdl.handle.net/10220/16801
http://dx.doi.org/10.1002/pssc.201084181
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Institution: Nanyang Technological University
Language: English

Internet

https://hdl.handle.net/10356/105232
http://hdl.handle.net/10220/16801
http://dx.doi.org/10.1002/pssc.201084181

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