Property study of aluminium oxide thin films by thermal annealing
Aluminium oxide thin films had been prepared by off-plane filtered cathodic vacuum arc (FCVA) under the oxygen partial pressure of 5 × 10-4 Torr at room temperature. Annealing effects on the properties of the films between 200 °C and 900 °C were investigated. Experiments results showed that the surf...
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/105232 http://hdl.handle.net/10220/16801 http://dx.doi.org/10.1002/pssc.201084181 |
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| Institution: | Nanyang Technological University |
| Language: | English |