Electrical properties and memory applications of Al-rich Al-based dielectric thin films

An AI-rich Al203 thin film was deposited on a p-type silicon substrate by rf sputtering to form AIIAI-rich AI20 3/p-Si diodes. The current-voltage (I-V) characteristics of the diodes were determined by carrier injection from either the Si substrate or the Al gate and by carrier transport along the t...

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Bibliographic Details
Main Author: Zhu, Wei
Other Authors: Chen Tupei
Format: Theses and Dissertations
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/54733
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Institution: Nanyang Technological University
Language: English