Electrical properties and memory applications of Al-rich Al-based dielectric thin films

• المؤلف الرئيسي: Zhu, Wei
• مؤلفون آخرون: Chen Tupei
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/54733
• المؤسسة: Nanyang Technological University

An AI-rich Al203 thin film was deposited on a p-type silicon substrate by rf sputtering to form AIIAI-rich AI20 3/p-Si diodes. The current-voltage (I-V) characteristics of the diodes were determined by carrier injection from either the Si substrate or the Al gate and by carrier transport along the t...