Electrical properties and memory applications of Al-rich Al-based dielectric thin films

• Main Author: Zhu, Wei
• Other Authors: Chen Tupei
• Format: Theses and Dissertations
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/54733
• Institution: Nanyang Technological University

An AI-rich Al203 thin film was deposited on a p-type silicon substrate by rf sputtering to form AIIAI-rich AI20 3/p-Si diodes. The current-voltage (I-V) characteristics of the diodes were determined by carrier injection from either the Si substrate or the Al gate and by carrier transport along the t...