Layer-by-layer thinning of MoS2 by thermal annealing

• Main Authors: Lu, Xin, Utama, Muhammad Iqbal Bakti, Zhang, Jun, Zhao, Yanyuan, Xiong, Qihua
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/103445; http://hdl.handle.net/10220/24522
• Institution: Nanyang Technological University

By thermal annealing, few-layer MoS2 flakes can be thinned down. In one hour, the upper layer is peeled off due to sublimation. Eventually, monolayer MoS2 is achieved. We have characterized the process by optical contrast, Raman spectroscopy and atomic force microscopy (AFM), and observed a mixture...