Thermal conductivity measurement of thin films and bulk materials by 3 omega method

• Main Author: Tham, Wai Hoe.
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/45353
• Institution: Nanyang Technological University

This final year project presents the thermal conductivity characterization of Silicon bulk substrate and several thin films such as Silicon dioxide, amorphous Carbon films and Bismuth telluride using the 3-Omega technique. We firstly study the theoretical concept of the 3-Omega method as well as...