Thermal conductivity measurement of thin films and bulk materials by 3 omega method

• 主要作者: Tham, Wai Hoe.
• 其他作者: Tay Beng Kang
• 格式: Final Year Project
• 語言: English
• 出版: 2011
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/45353
• 機構: Nanyang Technological University

This final year project presents the thermal conductivity characterization of Silicon bulk substrate and several thin films such as Silicon dioxide, amorphous Carbon films and Bismuth telluride using the 3-Omega technique. We firstly study the theoretical concept of the 3-Omega method as well as...