“Multipoint force feedback” leveling of massively parallel tip arrays in scanning probe lithography

Nanoscale patterning with massively parallel 2D array tips is of significant interest in scanning probe lithography. A challenging task for tip-based large area nanolithography is maintaining parallel tip arrays at the same contact point with a sample substrate in order to pattern a uniform array. H...

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Bibliographic Details
Main Authors: Noh, Hanaul, Jung, Goo-Eun, Kim, Sukhyun, Yun, Seong-Hun, Jo, Ahjin, Kahng, Se-Jong, Cho, Nam-Joon, Cho, Sang-Joon
Other Authors: School of Chemical and Biomedical Engineering
Format: Article
Language:English
Published: 2015
Subjects:
Online Access:https://hdl.handle.net/10356/106024
http://hdl.handle.net/10220/26285
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Institution: Nanyang Technological University
Language: English