Design optimization for an SOI MOEMS accelerometer

• Main Authors: Teo, Adrian J. T., Li, Holden King-Ho, Tan, Say Hwa, Yoon, Yong-Jin
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2019
• 主題: Design Optimization; Accelerometer; DRNTU::Engineering::Mechanical engineering
• 在線閱讀: https://hdl.handle.net/10356/106469; http://hdl.handle.net/10220/47914

With optimization being vital, the design optimization of a silicon-on-insulator (SOI) micro-opto-electro-mechanical systems accelerometer is discussed in this paper. This process has enabled a simplistic design that employs double-sided deep reactive ion etching (DRIE) on SOI wafer to be able to at...