Design, simulation and characterization of wheatstone bridge structured metal thin film uncooled microbolometer

• Main Authors: Ang, Wan Chia, Kropelnicki, Piotr, Tsai, Julius Ming Lin, Leong, Kam Chew, Tan, Chuan Seng
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/106737; http://hdl.handle.net/10220/25084; http://dx.doi.org/10.1016/j.proeng.2013.10.013
• Institution: Nanyang Technological University

It is demonstrated for the first time that the Wheatstone bridge structured metal thin film resistive uncooled microbolometer (in short, WB-bolometer) provides promising temperature sensitivity. This paper describes the design, simulation, and characterization of WB-bolometer using titanium nitride...